Five Days Workshop on MEMS and NEMS @ IIT Hyderabad

The hands on training (experimental) will include the design of simple MEMS/ NEMS structures, fabrication of MEMS/ NEMS structures using photoresists, transfer of pattern into polymers using soft lithography, and wet etching to develop the suspended structures. Moreover the course will be very useful for those who wish to make their career in the MEMS and Semiconductor industries. Course Contents: Fundamental basis of MEMS/NEMS. Overview of basic microfabrication processes. Bulk and Surface micromachining. Polymer and Carbon MEMS. MEMS design, modeling and simulation. 3D Integration. MEMS-based sensors and actuators. Comprehensive hands-on experience of MEMS Experiment Design and simulation of microcantilever beams and diaphragms Wafer cleaning Photolithography (resist spin coating, exposure, development) Silicon micromachining Fabrication of suspended MEMS structures (e.g. microcantilever, diaphragm, etc.) Fabrication of SU-8 MEMS Structures Polymer and carbon based MEMS structures using soft-lithography Eligibility: Completed B.Tech./ BE/ M.Sc./ M.Tech. in any branch. Student, Engineers, Scientists, Technologists and Faculty seeking basic and better understanding of MEMS and NEMS. Course fee details: This workshop is ONLY for participants from TEQIP supported colleges/institutions. There is no registration fee for participants from TEQIP supported institutions. Registration form should be signed and sealed by TEQIP coordinator faculty of your institute only then the registration form will be valid. In case of no show even after confirmed registration, information will be sent to Head and TEQIP Coordinator of your organization. That particular candidate will not be allowed in future TEQIP events at IITH. Limited accommodation may be available on sharing basis in IITH hostel only for students, based on prior request. For faculty, hotel accommodation will be provided on twin-sharing basis. How to Apply: Candidates may download the registration form at http://www.iith.ac.in/~memslab/ MEMSWorkshop15/Registration_MEMS%20Workshop_2015.pdf As Seats are very limited due to experimental hands on session, it is recommended to register at the earliest without waiting for last date of registration. For registration, please fill the registration form and send the scanned copy to iithmemsworkshop@gmail.com  . However you need to bring original copy of your registration form when you come to attend the workshop. Important Dates: Last Date for registration: 15th November, 2015 Workshop Dates: 14-18 December, 2015 For more details, please visit: http://www.iith.ac.in/~memslab/MEMSWorkshop15/